IEEE - Institute of Electrical and Electronics Engineers, Inc. - An Electrothermal Actuator With Two Degrees of Freedom Serving as the Arm of a MEMS Gripper

Author(s): Dian-Sheng Chen ; Po-Fan Yeh ; Yu-fan Chen ; Chun-Wei Tsai ; Chun-Yi Yin ; Ren-Jie Lai ; Jui-che Tsai
Sponsor(s): IEEE Industrial Electronics Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2014
Volume: 61
Page(s): 5,465 - 5,471
ISSN (Paper): 0278-0046
ISSN (Online): 1557-9948
DOI: 10.1109/TIE.2013.2293693
Regular:

In this paper, we present an electrothermal actuator with two degrees of freedom that can achieve independent in-plane and out-of-plane motions. The device is fabricated with the MetalMUMPs, which... View More

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