IEEE - Institute of Electrical and Electronics Engineers, Inc. - Tunable Microcavity Based on Macroporous Silicon: Feasibility of Fabrication

Author(s): Galina V. Li ; Ekaterina V. Astrova ; Yulia A. Zharova ; Sergey A. Dyakov ; Anna V. Baldycheva ; Tatiana S. Perova ; Nilolay A. Gippius ; Sergei G. Tikhodeev
Sponsor(s): IEEE Lasers and Electro-Optics Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 August 2013
Volume: 31
Page Count: 7
Page(s): 2,694 - 2,700
ISSN (Paper): 0733-8724
ISSN (Online): 1558-2213
DOI: 10.1109/JLT.2013.2272037
Regular:

Simultaneous electrochemical etching of deep pores and trenches in silicon was used to fabricate a two-dimensional, photonic crystal slab (PCS). The structure consists of five rows of macro-pores... View More

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