IEEE - Institute of Electrical and Electronics Engineers, Inc. - Characterization of Integrated Planar Photonic Crystal Circuits Fabricated by a CMOS Foundry

Author(s): E. Schelew ; G. W. Rieger ; J. F. Young
Sponsor(s): IEEE Lasers and Electro-Optics Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2013
Volume: 31
Page Count: 10
Page(s): 239 - 248
ISSN (Paper): 0733-8724
ISSN (Online): 1558-2213
DOI: 10.1109/JLT.2012.2228466
Regular:

Integrated planar photonic crystal circuits in silicon on insulator were fabricated with a single-etch-step process by a foundry using complementary metal-oxide-semiconductor processing... View More

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