IEEE - Institute of Electrical and Electronics Engineers, Inc. - Enhancement of Silicon-Based Inductor Q-Factor Using Polymer Cavity

Author(s): Yee Mong Khoo ; Teck Guan Lim ; Soon Wee Ho ; Rui Li ; Yong-Zhong Xiong ; Xiaowu Zhang
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2012
Volume: 2
Page Count: 7
Page(s): 1,973 - 1,979
ISSN (Paper): 2156-3950
ISSN (Online): 2156-3985
DOI: 10.1109/TCPMT.2012.2204879
Regular:

A simple low-cost post-complementary metal-oxide-semiconductor-compatible process to enhance the performance of the planar spiral inductor in standard silicon (Si) substrate is... View More

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