IEEE - Institute of Electrical and Electronics Engineers, Inc. - Development Pattern Recognition Model for the Classification of Circuit Probe Wafer Maps on Semiconductors

Author(s): Cheng-Wei Chang ; Tsung-Ming Chao ; Jorng-Tzong Horng ; Chien-Feng Lu ; Rong-Hwei Yeh
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2012
Volume: 2
Page Count: 9
Page(s): 2,089 - 2,097
ISSN (Paper): 2156-3950
ISSN (Online): 2156-3985
DOI: 10.1109/TCPMT.2012.2215327
Regular:

Spatial defect patterns generated during integrated circuit (IC) manufacturing contain valuable information on the fabrication process and can help engineers identify the root causes of any... View More

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