IEEE - Institute of Electrical and Electronics Engineers, Inc. - Capacitance Analysis of Highly Leaky $\hbox{Al}_{2} \hbox{O}_{3}$ MIM Capacitors Using Time Domain Reflectometry

Author(s): Yonghun Kim ; Young Gon Lee ; Minwoo Kim ; Chang Goo Kang ; Ukjin Jung ; Jin Ju Kim ; Seung Chul Song ; J. Blatchford ; B. Kirkpatrick ; H. Niimi ; Kwan Yong Lim ; Byoung Hun Lee
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2012
Volume: 33
Page Count: 3
Page(s): 1,303 - 1,305
ISSN (Paper): 0741-3106
ISSN (Online): 1558-0563
DOI: 10.1109/LED.2012.2205213
Regular:

Characterization of metal-insulator-metal (MIM) capacitors with a scaled dielectric is a challenge using conventional capacitance-voltage (C-V) measurements due to a high... View More

Advertisement