IEEE - Institute of Electrical and Electronics Engineers, Inc. - Chamber Matching of Semiconductor Manufacturing Process Using Statistical Analysis

Author(s): Tian-Hong Pan ; D. S-H Wong ; Shi-Shang Jang
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 July 2012
Volume: 42
Page Count: 6
Page(s): 571 - 576
ISSN (Paper): 1094-6977
ISSN (Online): 1558-2442
DOI: 10.1109/TSMCC.2011.2161669
Regular:

Tools or chambers at a single step are designed to perform the same processing in semiconductor industry. In practice, tools or chambers differ and do not process lots identically. The ability to... View More

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