IEEE - Institute of Electrical and Electronics Engineers, Inc. - Recent advances in MEMS sensor technology—thermo-fluid and electro-magnetic devices

Author(s): F. Khoshnoud ; C. W. de Silva
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2012
Volume: 15
ISSN (Paper): 1094-6969
DOI: 10.1109/MIM.2012.6204868
Regular:

This is the final part of a three-part series on micro-electromechanical systems (MEMS) sensor technology. In the first part, a general introduction to MEMS sensing was given including the... View More

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