IEEE - Institute of Electrical and Electronics Engineers, Inc. - Recent advances in MEMS sensor technology – biomedical applications

Author(s): F. Khoshnoud ; C. W. de Silva
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 February 2012
Volume: 15
ISSN (Paper): 1094-6969
DOI: 10.1109/MIM.2012.6145254
Regular:

Micro-electromechanical systems (MEMS) use microminiature sensors and actuators. MEMS technology provides the benefits of small size, low weight, high performance, easy mass-production and... View More

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