IEEE - Institute of Electrical and Electronics Engineers, Inc. - Compact On-Chip Microtensile Tester With Prehensile Grip Mechanism

Author(s): S. S. Hazra ; M. S. Baker ; J. L. Beuth ; M. P. de Boer
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 August 2011
Volume: 20
Page Count: 11
Page(s): 1,043 - 1,053
ISSN (Paper): 1057-7157
ISSN (Online): 1941-0158
DOI: 10.1109/JMEMS.2011.2159097
Regular:

Accurate measurement of material strength at small scales is of critical importance for the design and manufacture of reliable micro- and nanoscale devices. Many materials of interest, e.g.,... View More

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