IEEE - Institute of Electrical and Electronics Engineers, Inc. - A Novel Piezoactuated XY Stage With Parallel, Decoupled, and Stacked Flexure Structure for Micro-/Nanopositioning

Author(s): Yangmin Li ; Qingsong Xu
Sponsor(s): IEEE Industrial Electronics Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 August 2011
Volume: 58
Page Count: 15
Page(s): 3,601 - 3,615
ISSN (Paper): 0278-0046
ISSN (Online): 1557-9948
DOI: 10.1109/TIE.2010.2084972
Regular:

This paper presents the design and manufacturing processes of a new piezoactuated XY stage with integrated parallel, decoupled, and stacked kinematics structure for micro-/nanopositioning... View More

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