IEEE - Institute of Electrical and Electronics Engineers, Inc. - Operation of a Novel Device With Suspended Nanowire Channels

Author(s): Horng-Chih Lin ; Chia-Hao Kuo ; Guan-Jang Li ; Chun-Jung Su ; Tiao-Yuan Huang
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 2010
Volume: 31
Page Count: 3
Page(s): 384 - 386
ISSN (Paper): 0741-3106
ISSN (Online): 1558-0563
DOI: 10.1109/LED.2010.2041744
Regular:

We investigate the operation of a new device featuring a side-gate scheme and suspended poly-Si nanowire (NW) channels. The fabrication adopted a sidewall-spacer-etching technique to form... View More

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