IEEE - Institute of Electrical and Electronics Engineers, Inc. - Integrated force arrays

Proceedings of Micro Electro Mechanical Systems

Author(s): Bobbio, S.M. ; Kellam, M.D. ; Dudley, B.W. ; Goodwin-Johansson, S. ; Jones, S.K. ; Jacobson, J.D. ; Tranjan, F.M. ; DuBois, T.D.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1993
Conference Location: Fort Lauderdale, FL, USA
Conference Date: 10 February 1993
Page(s): 149 - 154
ISBN (Paper): 0-7803-0957-X
DOI: 10.1109/MEMSYS.1993.296931
Regular:

Integrated force arrays (IFAs), which are flexible metallized membranes that can be patterned using the techniques of VLSI electronics and that undergo substantial deformation when voltage is... View More

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