IEEE - Institute of Electrical and Electronics Engineers, Inc. - A planar Bi-Sb multijunction thermal converter with small ac-dc transfer differences

Author(s): Jin-Sup Kim ; Hyun-Cheol Lee ; Jong-Hyun Lee ; Jung-Hee Lee ; Se Il Park ; Sung-Won Kwon
Sponsor(s): IEEE Instrumentation and Measurement Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 February 2002
Volume: 51
Page Count: 5
Page(s): 115 - 119
ISSN (Paper): 0018-9456
ISSN (Online): 1557-9662
DOI: 10.1109/19.989913
Regular:

A planar Bi-Sb multijunction thermal converter was fabricated on the LPCVD Si/sub 3/N/sub 4//SiO/sub 2//Si/sub 3/N/sub 4/-diaphragm, prepared by silicon bulk micromachining, which thermally... View More

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