IEEE - Institute of Electrical and Electronics Engineers, Inc. - A silicon thermal astable multivibrator for flow and temperature sensing

Author(s): S.K. Gamage ; N. Okulan ; H.T. Henderson
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2002
Volume: 49
Page Count: 4
Page(s): 2,355 - 2,358
ISSN (Paper): 0018-9383
ISSN (Online): 1557-9646
DOI: 10.1109/TED.2002.805577
Regular:

Here we report for the first time on a thermal astable multivibrator modality made possible with a silicon bulk micromachined flow sensor. The sensor shows an oscillatory response for constant... View More

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