IEEE - Institute of Electrical and Electronics Engineers, Inc. - The MEMS handbook [Book Review]

Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2002
Volume: 18
Page(s): 42 - 44
ISSN (Electronic): 1558-1888
ISSN (Paper): 8755-3996
DOI: 10.1109/MCD.2002.1035353
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