IEEE - Institute of Electrical and Electronics Engineers, Inc. - Is there light at the end of the road for optical lithography?

Author(s): H.J. Levinson
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 July 2002
Volume: 18
Page(s): 50 - 58
ISSN (Electronic): 1558-1888
ISSN (Paper): 8755-3996
DOI: 10.1109/MCD.2002.1021122
Regular:

As optical lithography nears its physical limits, this article discusses the 2001 ITRS update to the lithography roadmap and reviews the possible next-generation lithography technologies outlined... View More

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