IEEE - Institute of Electrical and Electronics Engineers, Inc. - Multivariable feedback relevant system identification of a wafer stepper system

Author(s): R.A. de Callafon ; P.M.J. Van den Hof
Sponsor(s): IEEE Control Systems Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 March 2001
Volume: 9
Page Count: 10
Page(s): 381 - 390
ISSN (Paper): 1063-6536
ISSN (Online): 1558-0865
DOI: 10.1109/87.911390
Regular:

This paper discusses the approximation and feedback relevant parametric identification of a positioning mechanism present in a wafer stepper. The positioning mechanism in a wafer stepper is used... View More

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