IEEE - Institute of Electrical and Electronics Engineers, Inc. - Fabrication of multilayer systems combining microfluidic and microoptical elements for fluorescence detection

Author(s): J.-C. Roulet ; R. Volkel ; H.P. Herzig ; E. Verpoorte ; N.F. de Rooij ; R. Dandliker
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2001
Volume: 10
Page Count: 10
Page(s): 482 - 491
ISSN (Paper): 1057-7157
ISSN (Online): 1941-0158
DOI: 10.1109/84.967369
Regular:

This paper presents the fabrication of a microchemical chip for the detection of fluorescence species in microfluidics. The microfluidic network is wet-etched in a Borofloat 33 (Pyrex) glass wafer... View More

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