IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design and batch fabrication of probes for sub-100 nm scanning thermal microscopy

Author(s): L. Shi ; O. Kwon ; A.C. Miner ; A. Majumdar
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2001
Volume: 10
Page Count: 9
Page(s): 370 - 378
ISSN (Paper): 1057-7157
ISSN (Online): 1941-0158
DOI: 10.1109/84.946785
Regular:

A batch fabrication process has been developed for making cantilever probes for scanning thermal microscopy (SThM) with spatial resolution in the sub-100 nm range. A heat transfer model was... View More

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