IEEE - Institute of Electrical and Electronics Engineers, Inc. - Plastic deformation magnetic assembly (PDMA) of out-of-plane microstructures: Technology and application

Author(s): J. Zou ; J. Chen ; C. Liu ; J.E. Schutt-Aine
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2001
Volume: 10
Page Count: 8
Page(s): 302 - 309
ISSN (Paper): 1057-7157
ISSN (Online): 1941-0158
DOI: 10.1109/84.925791
Regular:

This paper presents results on the development and application of a three-dimensional (3-D) microstructure assembly technique-Plastic deformation magnetic assembly (PDMA). In PDMA, certain part of... View More

Advertisement