IEEE - Institute of Electrical and Electronics Engineers, Inc. - Process yields for laser repair of aged, stiction-failed, MEMS devices

Author(s): J.W. Rogers ; L.M. Phinney
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2001
Volume: 10
Page Count: 6
Page(s): 280 - 285
ISSN (Paper): 1057-7157
ISSN (Online): 1941-0158
DOI: 10.1109/84.925783
Regular:

Stiction, the adhesion of micromachined components to each other or the substrate, decreases production yields and operational lifetimes for MEMS devices. A recent study demonstrated the... View More

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