IEEE - Institute of Electrical and Electronics Engineers, Inc. - A high-sensitivity polyimide capacitive relative humidity sensor for monitoring anodically bonded hermetic micropackages

Author(s): M. Dokmeci ; K. Najafi
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2001
Volume: 10
Page Count: 8
Page(s): 197 - 204
ISSN (Paper): 1057-7157
ISSN (Online): 1941-0158
DOI: 10.1109/84.925735
Regular:

This paper presents the design, fabrication and complete characterization of a high-sensitivity polyimide-based humidity sensor for monitoring internal humidity level in anodically bonded hermetic... View More

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