IEEE - Institute of Electrical and Electronics Engineers, Inc. - A HARPSS polysilicon vibrating ring gyroscope

Author(s): F. Ayazi ; K. Najafi
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2001
Volume: 10
Page Count: 11
Page(s): 169 - 179
ISSN (Paper): 1057-7157
ISSN (Online): 1941-0158
DOI: 10.1109/84.925732
Regular:

This paper presents the design, fabrication, and testing of an 80-/spl mu/m-thick, 1.1 mm in diameter high aspect-ratio (20:1) polysilicon ring gyroscope (PRG). The vibrating ring gyroscope was... View More

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