IEEE - Institute of Electrical and Electronics Engineers, Inc. - Microscale materials testing using MEMS actuators

Author(s): M.A. Haque ; M.T.A. Saif
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 March 2001
Volume: 10
Page Count: 7
Page(s): 146 - 152
ISSN (Paper): 1057-7157
ISSN (Online): 1941-0158
DOI: 10.1109/84.911103
Regular:

Small size scale and high resolutions in force and displacement measurements make MEMS actuators appropriate for micromechanical testing. In this paper, for the first time, we present... View More

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