IEEE - Institute of Electrical and Electronics Engineers, Inc. - Silicon carbide micro-reaction-sintering using micromachined silicon molds

Author(s): S. Tanaka ; S. Sugimoto ; J.-F. Li ; R. Watanabe ; M. Esashi
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 March 2001
Volume: 10
Page Count: 7
Page(s): 55 - 61
ISSN (Paper): 1057-7157
ISSN (Online): 1941-0158
DOI: 10.1109/84.911092
Regular:

This paper describes a novel process, "silicon carbide micro-reaction-sintering," to reaction-sinter three-dimensional silicon carbide microstructures using micromachined silicon molds.... View More

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