IEEE - Institute of Electrical and Electronics Engineers, Inc. - Microstructure to substrate self-assembly using capillary forces

Author(s): U. Srinivasan ; D. Liepmann ; R.T. Howe
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 March 2001
Volume: 10
Page Count: 8
Page(s): 17 - 24
ISSN (Paper): 1057-7157
ISSN (Online): 1941-0158
DOI: 10.1109/84.911087
Regular:

We have demonstrated the fluidic self-assembly of micromachined silicon parts onto silicon and quartz substrates in a preconfigured pattern with submicrometer positioning precision. Self-assembly... View More

Advertisement