IEEE - Institute of Electrical and Electronics Engineers, Inc. - Surface micromachined polyimide scanning thermocouple probes

Author(s): M.-H. Li ; J.J. Wu ; Y.B. Gianchandani
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 March 2001
Volume: 10
Page Count: 7
Page(s): 3 - 9
ISSN (Paper): 1057-7157
ISSN (Online): 1941-0158
DOI: 10.1109/84.911085
Regular:

This paper describes micromachined scanning thermocouple probes that exploit the low thermal conductivity and the high mechanical flexibility of polyimide as a structural material. They are... View More

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