IEEE - Institute of Electrical and Electronics Engineers, Inc. - Progress toward host tool integration of in situ particle monitors

Author(s): Borden, P.G. ; Burghard, R.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1992
Conference Location: Cambridge, MA, USA, USA
Conference Date: 30 September 1992
Page(s): 16 - 17
ISBN (Paper): 0-7803-0740-2
DOI: 10.1109/ASMC.1992.253826
Regular:

The authors point out that in situ particle monitoring has gained substantial acceptance as a manufacturing process control technique, with the capability of providing automated 100% inspection... View More

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