IEEE - Institute of Electrical and Electronics Engineers, Inc. - Integrated electroplated micromachined magnetic devices using low temperature fabrication processes

Author(s): Jae Yeong Park ; M.G. Allen
Sponsor(s): IEEE Components, Packaging, and Manufacturing Technology Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Volume: 23
Page Count: 8
Page(s): 48 - 55
ISSN (Paper): 1521-334X
ISSN (Online): 1558-0822
DOI: 10.1109/6104.827526
Regular:

Micromachining techniques are used to realize inductors and transformers integrated with a multichip package, allowing compact integration with chips, sensors, and other components. The processing... View More

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