IEEE - Institute of Electrical and Electronics Engineers, Inc. - Micromachined resonant temperature sensors: theoretical and experimental results

Author(s): T.G. Leblois ; C.R. Tellier
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 March 2000
Volume: 47
Page Count: 8
Page(s): 333 - 340
ISSN (Paper): 0885-3010
DOI: 10.1109/58.827417
Regular:

Describes the study of quartz temperature sensors based on new bulk acoustic wave microresonators operating in thickness modes. First, we compare the thermal sensitivity and the electromechanical... View More

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