IEEE - Institute of Electrical and Electronics Engineers, Inc. - Failure Reporting, Analysis And Corrective Action System In The US Semiconductor Manufacturing Equipment Industry: A Continuous Improvement Process

Author(s): Villacourt, M.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1992
Conference Location: Baltimore, MD
Conference Date: 28 September 1992
Page(s): 111 - 115
ISBN (Paper): 0-7803-0755-0
DOI: 10.1109/IEMT.1992.639872
Advertisement