IEEE - Institute of Electrical and Electronics Engineers, Inc. - Overhung electrostatic microgripper

Author(s): Chang-Jin Kim ; Pisano, A.P. ; Muller, R.S.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1991
Conference Location: San Francisco, CA, USA
Conference Date: 24 June 1991
Page(s): 610 - 613
ISBN (Paper): 0-87942-585-7
DOI: 10.1109/SENSOR.1991.148952
Regular:

A monolithic microgripper unit suitable for mounting on a micropositioner has been designed and fabricated by a combination of surface and bulk micromachining. The unit consists of a silicon die... View More

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