IEEE - Institute of Electrical and Electronics Engineers, Inc. - Microfabrication Of Sensors And Actuators For Microrobots

IEEE International Workshop on Intelligent Robots

Author(s): W. Ehrfeld ; F. Gotz ; D. Munchmeyer ; D. Schmidt
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1988
Conference Location: Tokyo, Japan, Japan
Conference Date: 31 October 1988
Page Count: 5
Page(s): 3 - 7
DOI: 10.1109/IROS.1988.592385
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