IEEE - Institute of Electrical and Electronics Engineers, Inc. - A non-destructive technique for the evaluation of electric field regions in semiconductor devices

Author(s): McArthur, D.C.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1987
Conference Location: Washington, DC, USA, USA
Conference Date: 6 December 1987
Page(s): 682 - 685
DOI: 10.1109/IEDM.1987.191520
Regular:

A flying spot scanner system that produces real time electric field images of semiconductor devices is described. Electric field images of LDMOS transistors are generated by probing the surface of... View More

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