IEEE - Institute of Electrical and Electronics Engineers, Inc. - Submicron Optical Contrast Enhanced Lithography Using Water-Soluble Materials

Author(s): Sasago, M. ; Endo, M. ; Ogawa, K. ; Hirai, Y. ; Nomura, N. ; Ohzone, T. ; Ishihara, T.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 1985
Conference Location: Kobe, Japan, Japan
Conference Date: 14 May 1985
Page(s): 76 - 77
ISBN (Paper): 4-930813-09-3
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